Abstract:By using Super efficiency DEA Model to analysis the survey data of Shanghai 6 816 emerging industries enterprises, the empirical analysis, by the micro perspective, aimed to compare with different forms of ownership efficiencies of technological innovation, and to explore the deep reasons of such differences. The research shows that: Efficiencies of technological innovation obviously vary in different forms of ownerships, among which, the private owned companies have the high efficiencies of technological innovation; the private partnership owned and other 12 forms have the medium efficiencies; the Sino foreign joint and other 5 forms have the low efficiencies. The foreign and the Sino foreign joint are both inefficient while the private owned generally have the high efficiencies. The solely state owned, collectively owned, the state owned and the foreign owned all have redundancy on governmental R&D subsidies but they do not fully use them.