Based on wave equation of non-Fourier's law of heat conduction,image method and the expansion method of wave functions,an investigation is made of the thermal wave scattering of subsurface spheroid in solid materials.This paper presents a general solution of scattered waves based on wave equations of heat conduction.An analysis is made of the effect of different physical parameters on the temperature distribution.The thermal waves are excited at surfaces of opaque materials by modulated optical beams.The circular spheroid is taken as a cavity under thermal insulation conditions.