基于遗传算法的半导体生产线调度研究进展

Advances in Semiconductor Wafer Fabrication Scheduling Based on Genetic Algorithm

摘要:

半导体生产线调度是制造系统实际生产中的重要问题,也是理论研究的难点之一.遗传算法是计算智能的主要研究对象,因此基于遗传算法的半导体生产线调度研究,具有非常重要的研究价值和实践意义,已经引起了国内外研究者的广泛关注.文中评述近几年来在半导体生产线调度优化中遗传算法的应用,详细介绍了算法编码、操作、参数的选择、算法的改进及具体应用,并指出这一领域中值得进一步研究的一些问题和可能的发展方向.

Abstract:

Scheduling for semiconductor wafer fabrication is an important problem in actual production of manufacturing system, it is also one of the difficult problems of theory research. Genetic algorithm is a major object of computational intelligence study. So, the study on genetic algorithm-based semiconductor wafer fabrication scheduling has been paid much attention in the past few years due to its research value and significance in numerous applications. The application of genetic algorithm in semiconductor wafer fabrication scheduling is reviewed. This paper presents a comprehensive survey on the issues such as encoding, operation, parameter choice, improvement and real application. Some problems worthy of further study and the probable developing trends in the field are also presented.