Petri网技术在半导体生产线建模中的应用

Application of Petri-net Technique in Modeling of Semiconductor Wafer Fabrication

摘要:

综述了Petri网在半导体生产线优化调度领域应用的最新研究进展,涉及半导体生产线主要特征、建模方法、Petri网类型、调度策略及具体应用等问题,并指出这一领域值得进一步研究的问题和可能的发展方向.

Abstract:

The recent research progress of Petri-net-based modeling for semiconductor wafer fabrication is presented,including the important characteristics of semiconductor wafer fabrication,modeling approach,modes of Petri-net,scheduling methods and real application.Finally,the paper presents some problems worthy of further study and probably developing trends in the semiconductor manufacturing field.