风机过滤单元性能指标参考限值与初期设备优选

Performance Index Reference Limits and Initial Selection Optimization of Fan Filter Units

摘要:

为填补风机过滤单元（fan filter units）的研究及标准中未提供设备最优选择方式的空缺，基于积累的大量FFU性能测试数据以及国内半导体行业的用户要求提出FFU各性能指标的参考限值，并提出利用层次分析法（AHP）将设备性能定性评估进行定量化求解，计算各指标所占权重，合理对FFU设备进行初期优选。总结测试数据发现，常规工况下风机过滤单元的性能逐年提升，表现为设备能耗显著降低、面风速均匀性更优、设备稳定性更强、噪声更小。各性能指标明确主观重要性后经层次分析法进行权重计算，能耗性能指数EPI 权重最大，面风速均匀性权重次之，过滤器阻力等指标权重较小。结合FFU设备性能测试结果，利用层次总排序计算出权重占比最大的设备为最优设备。

Abstract:

To fill the gap in research and standards on fan filter units （FFU）， this paper proposed the reference limits of each performance index of FFU based on both the accumulated multitude of testing data of commercial FFUs and the user requirements of domestic semiconductor industries. After the subjective importance of each performance index is determined， the weight calculation was conducted by adopting the analytic hierarchy process （AHP）. Summarizing the test data， it is found that the performance of the fan filter units under normal working conditions has been improved year by year， which is shown by the significant reduction of equipment energy consumption， better uniformity of surface wind speed， stronger stability of equipment， and lower noise. After the subjective importance of each performance index was clarified， the weight was calculated by the analytic hierarchy process. The weight of energy performance index （EPI） is the largest weight， followed by the airflow velocity uniformity， the filter resistance， and others. In combination with the performance test data of FFUs， the device with the largest weight ratio was calculated as the optimal device by using the total hierarchical ranking.