Modeling and Topology Optimization of MEMS Accelerometer Oriented to Output Performance

Abstract:

This work focuses on a capacitive micro accelerometer fabricated by micro electro mechanical systems MEMS technology, and the dynamics model between the detection characteristics of output performance (detection capacitance) and the microstructure is proposed. The calculation method of output performance of the accelerometer is presented. The analysis of the dynamics and detection characteristics of the accelerometer is achieved. To increase the output performance of the accelerometer, a structural topology optimization for the accelerometer is performed. The flow and mathematical model of the topology optimization for the accelerometer is built. A numerical example is presented to show the effectiveness of the method. The topology optimization results show that the output performance and sensitivity increase by 4.92%. The coupling of vibration modes is avoided and the quality factor is kept unchanged.