Advances in Semiconductor Wafer Fabrication Scheduling Based on Genetic Algorithm

Abstract:

Scheduling for semiconductor wafer fabrication is an important problem in actual production of manufacturing system, it is also one of the difficult problems of theory research. Genetic algorithm is a major object of computational intelligence study. So, the study on genetic algorithm-based semiconductor wafer fabrication scheduling has been paid much attention in the past few years due to its research value and significance in numerous applications. The application of genetic algorithm in semiconductor wafer fabrication scheduling is reviewed. This paper presents a comprehensive survey on the issues such as encoding, operation, parameter choice, improvement and real application. Some problems worthy of further study and the probable developing trends in the field are also presented.