Abstract:Laser frequency stabilization derived from Cr atomic beam laser induced fluorescence is a good way to solve excursion of laser frequency in Cr atom lithography.Calculation and experiments are conducted to reveal the effects of laser power and crucible temperature on the induced fluorescence intensity .With fixed crucible temperature,the central intensity of fluorescence doesn't change very much after the laser power reaches 6mW due to the Cr saturation absorption.In addition,the higher power the laser has,the larger full width at half maximum(FWHM),and the lower contrast the fluorescence will have.With fixed laser power,the higher temperature the crucible is at,the higher central intensity fluorescence will have due to the fact that the higher temperature of crucible can make more atoms,and the sharper contrast it will have,but the FWHM doesn't change much with crucible temperature.The experiment result agrees with calculation well.