Performance Index Reference Limits and Initial Selection Optimization of Fan Filter Units

Abstract:

To fill the gap in research and standards on fan filter units （FFU）， this paper proposed the reference limits of each performance index of FFU based on both the accumulated multitude of testing data of commercial FFUs and the user requirements of domestic semiconductor industries. After the subjective importance of each performance index is determined， the weight calculation was conducted by adopting the analytic hierarchy process （AHP）. Summarizing the test data， it is found that the performance of the fan filter units under normal working conditions has been improved year by year， which is shown by the significant reduction of equipment energy consumption， better uniformity of surface wind speed， stronger stability of equipment， and lower noise. After the subjective importance of each performance index was clarified， the weight was calculated by the analytic hierarchy process. The weight of energy performance index （EPI） is the largest weight， followed by the airflow velocity uniformity， the filter resistance， and others. In combination with the performance test data of FFUs， the device with the largest weight ratio was calculated as the optimal device by using the total hierarchical ranking.